Microfabrication is a very new production method in the microelectronics industry, having only recently been developed. Traditional machining technologies, such as electro-discharge machining, were effectively shrunk down to achieve microfabrication. Microfabrication is the technique of creating small structures on a micrometer or smaller scale. Integrated circuits, semiconductors, microfluidic devices, solar panel cells, flat panel displays, sensors, fuel cells, and other manufacturing segments all employ it. Many disciplines of science and engineering, including physics, chemistry, materials science, computer science, ultra-precision engineering, fabrication techniques, and equipment design, are challenged by the miniaturisation of various gadgets. Microlithography, doping, thin films, etching, bonding, and polishing are the major concepts and principles of microfabrication.
The book investigates analyses and upholds the fundamentals of microfabrication, as well as their critical importance in modern times. The book makes a concerted attempt to make the reader's knowledge of the field's challenging concepts as simple and informative as feasible. The chapters in this book cover a wide spectrum of scientific disciplines such as lithography, pattern transfer with dry etching techniques, additive techniques, and wet bulk micromachining. It also explores thin film deposition in bulk micromachining, microelectromechanical systems, surface machining, micromachine developments, and scaling laws. The topics included in this book are of utmost significance and bound to provide incredible insights to readers. Its goal is to act as a resource guide for students and to make this discipline easier to study.
Preface
1. Introduction to Micro fabrication
1. Introduction
2. Micro fabrication Processes
3. Managing from Concept to Production
4. Equipment Figures of Merits
Conclusion
References
2. Lithography
1. Introduction
2. Technologies used in Lithography
3. Figures of Merit in Lithography
4. Materials In lithography
5. Process of Stone Lithography
6. Dehydration and HMDS
7. Photolithography Micro fabrication Technique
Conclusion
References
3. Pattern Transfer with Dry Etching Techniques
1. Introduction
2. Overview of Pattern Transfer
3. Dry etching
4. Process of dry etching
5. Types of Dry Etching
Conclusion
References
4. Pattern Transfer with Additive Techniques
1. Introduction
2. Physical Vapour Deposition (PVD)
3. Use of PVD Coatings
4. Cluster Beam Deposition
5. Chemical Vapor Deposition
6. How Does CVD Work?
7. CVD Apparatus
8. CVD Processes
9. Commercially important materials prepared by CVD
Conclusion
References
5. Wet Bulk Micromachining
1. Introduction
2. Etching In Micromachining
3. CMOS Compatible Wet Bulk Micromachining for MEMS
Applications
Conclusion
References
6. Thin Film Deposition in Bulk Micromachining
1. Introduction
2. Physical Vapor Deposition (PVD) and its Types
3. Characteristics of Thin Film Coatings
4. Integrated tools used in Thin film coatings
5. Applications of Thin Film Coatings
Conclusion
References
7. Micro electromechanical Systems (MEMS) Technology
1. Introduction
2. What is MEMS constituted of?
3. MEMS basic processes
4. LIGA
5. Other Micromachining Technologies
6. MEMS Process Integration
7. MODELING in MEMS
Conclusion
References
8. Surface Machining and the Concept of LIGA
1. Introduction
2. Wet and Dry Etch in Bulk Micromachining
3. Nanoparticle Deposition
4. Dip Coating in Surface Micromachining
5. Concept of LIGA
Conclusion
References
9. Micro machine Developments and Packaging
1. Introduction
2. Concept of Packaging in Micromachining
3. Overview of Packaging and Testing of Integrated Circuits and Microelectromechanical Systems
4. Interfaces between MEMS and its operating Environment
5. Packaging Materials in MEMS
6. Failure Analysis
7. RF MEMS Switch Fabrication and Packaging
Conclusion
References
10. Scaling Laws, Actuators and Power in Miniaturization
1. Introduction
2. Overview of Miniaturization in MEMS
3. Introduction to Scaling laws in Micro fabrication
4. Actuators in Miniaturization
5. Types of Actuators
6. Performance metrics for Actuators
7. Capabilities of a Linear Actuator
Conclusion
References
Index
Gaynell Adair obtained her Ph.D. in Nanoscience and Technology from Technological University, Florence. She has more than a decade of research experience in microelectronics, nanotechnology and production engineering. She has served as a Guest Lecturer at various universities across America and Europe. Adair has also contributed several research papers on nanofabrication, functional nanoparticles, nanomaterials, and advances in nanotechnology in international journals.
