Over the last ten years, micro- and nanoscale manufacturing has attracted a growing amount of interest and research effort from academia and business throughout the world. Silicon-based micro-electro-mechanical systems (MEMS) manufacturing is based on traditional lithography-based technology, but precision manufacturing technologies have been developed to encompass micro-scale dimensions and accuracies. Furthermore, these two fundamentally diverse technological ecosystems are being merged at the moment in order to capitalize on the capabilities of both platforms. The recent research in this book focuses on the development of new micro and nano manufacturing platforms while integrating the different technologies to manufacture the micro and nano components in a high throughput and cost effective manner. The chapters contain original theoretical and applied research in the areas of micro- and nano-manufacturing that are related to process innovation, accuracy, and precision, throughput enhancement, material utilization, compact equipment development, environmental and life-cycle analysis, and predictive modeling of manufacturing processes. For all those who are interested in micro fabrication and nano machining, this book can prove to be an essential guide.

Preface

1. Introduction 

2. Basic Technologies for Microsystems 

3. Advanced Microfabrication Methods 

4. Nanotechnology 

5. Micro Cutting Mechanics 

6. Introduction to Production Management

7. Microfluidic Components, Devices and lntegrated Lab-on-a-Chip

Systems

8. Microfabrication for Novel Products in Drug Delivery 

9. Laser-based Micro and Nanofabrication 

10. Microfabrication using X-ray Lithography 

Index

Rudy Hollins is an Adjunct Professor at Technical Institute, Kemerovo. He received his Ph.D. in Mechanical Engineering from Public University of Technology, Athens. He has extensively worked on properties of materials in the field of micro scale metal cutting, micro and nano abrasive machining and laser micro machining. Hollins has presented 15 research papers in the field of micro and nano manufacturing. He has also won over 10 awards and recognitions for his researches and services.